KLA inks MoU with TN govt for Rs 3,600 crore R&D and innovation campus in Chennai

Semiconductor process control and process-enabling technology player KLA Corporation on Friday said it had signed a Memorandum of Understanding (MoU) with the government of Tamil Nadu to establish a new research & development (R&D) and innovation campus in Chennai. As part of the agreement, it intends to invest up to Rs 3,600 crore over the next decade, KLA said.

ET was the first to report on Nov 3 that the American wafer fab equipment maker was in talks with the Tamil Nadu government to set up an R&D centre in the city.